Room-Temperature Sensing of Single Electrons Using Vibrating-Reed Electrometer in Silicon-on-Glass Technology
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DOI: 10.1109/led.2018.2876506
Abstract: In the commonly used existing silicon-on-insulator microelectromechanical systems (MEMS) process, a silicon-oxide-silicon sandwich structure in the sensor device creates parasitic capacitance, which reduces the charge sensitivity. In this letter, for the first time, we demonstrate… read more here.
Keywords: glass; silicon glass; silicon; tex math ... See more keywords