Nonlinear Vibration of Size Dependent Microresonators with an Electrostatically Actuated Proof Mass
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DOI: 10.1142/s0219455418500578
Abstract: In this paper, the dynamic and nonlinear vibration responses of a microresonator containing a microbridge with a proof mass located at its middle are studied. The proof mass of the microresonator i... read more here.
Keywords: size dependent; vibration size; mass; nonlinear vibration ... See more keywords