Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3554-y
Abstract: The dynamic behavior of micro-cantilevers and micro-bridges under electrostatic and thermal base actuations is investigated in this paper. To solve the equation of motion for the systems, a finite element model is presented and numerical solutions… read more here.
Keywords: mems considering; particle sensing; dynamics vibrations; considering thermal ... See more keywords