The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Access"
DOI: 10.1109/access.2021.3103235
Abstract: Virtual metrology (VM) is an enabling technology capable of performing virtual inspection on the metrology quality of wafers. Instead of physically acquiring the metrology measurements, VM applies conjecture models on the process data of wafers… read more here.
Keywords: system; metrology; sampling scheme; smart sampling ... See more keywords
Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Access"
DOI: 10.1109/access.2022.3193783
Abstract: Physical metrology inspections are crucial in semiconductor fabrication to ensure that wafers are fabricated within the production specification limits and to prevent faulty wafers from being shipped and installed in customer devices. However, it is… read more here.
Keywords: fabrication; virtual metrology; metrology; deep learning ... See more keywords
Convolutional Autoencoder and Transfer Learning for Automatic Virtual Metrology
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Robotics and Automation Letters"
DOI: 10.1109/lra.2022.3187617
Abstract: To ensure stable processing and high-yield production, high-tech factories (e.g., semiconductor, TFT-LCD) demand product quality total inspection. Generally speaking, sampling inspection only measures a few samples and comes with metrology delay, thus it usually cannot… read more here.
Keywords: convolutional autoencoder; virtual metrology; transfer learning; metrology ... See more keywords
Developing the Keep-Important-Samples Scheme for Training the Advanced CNN-Based Automatic Virtual Metrology Models
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Robotics and Automation Letters"
DOI: 10.1109/lra.2024.3414258
Abstract: Virtual Metrology (VM) technology can convert offline sampling inspection into online and real-time total inspection. As the processes of high-tech industries (semiconductor or TFT-LCD) are getting more sophisticated, higher VM prediction accuracy is demanded. With… read more here.
Keywords: virtual metrology; advanced avmcnn; metrology; important samples ... See more keywords
Product-to-Product Virtual Metrology of Color Filter Processes in Panel Industry
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2021.3124157
Abstract: The current thin film transistor liquid crystal display (TFT-LCD) panel industry evolves in transition from volume production to customized production service as a major competition strategy. Owing to the highly mixed production type of small… read more here.
Keywords: color filter; product product; virtual metrology; production ... See more keywords
A Novel Rolling-Window and Production-Maintenance-Based Machine Learning Approach to Virtual Metrology in Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2025.3570863
Abstract: Virtual metrology enables semiconductor manufacturers to continuously monitor and predict the quality and performance of semiconductor production during the manufacturing process. This kind of real-time monitoring tool is essentially important for maintaining process stability and… read more here.
Keywords: virtual metrology; semiconductor; metrology; production maintenance ... See more keywords
Partial Bayesian Co-training for Virtual Metrology
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Industrial Informatics"
DOI: 10.1109/tii.2019.2903718
Abstract: Building accurate regression models using limited data is a challenging problem in manufacturing data analysis. In this paper, we study a particular semisupervised learning problem where labeled data are limited, while unlabeled data are plentiful.… read more here.
Keywords: training virtual; model; virtual metrology; metrology ... See more keywords
Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Industrial Informatics"
DOI: 10.1109/tii.2022.3162268
Abstract: Virtual metrology (VM) is widely used for yield management and control in semiconductor manufacturing owing to its high real-time inspection, low cost, and convenient maintenance. However, the multimodal characteristics of batch processes are ignored in… read more here.
Keywords: driven adaptive; virtual metrology; prediction; metrology ... See more keywords
Development of Virtual Metrology Using Plasma Information Variables to Predict Si Etch Profile Processed by SF6/O2/Ar Capacitively Coupled Plasma
Sign Up to like & getrecommendations! Published in 2021 at "Materials"
DOI: 10.3390/ma14113005
Abstract: In the semiconductor etch process, as the critical dimension (CD) decreases and the difficulty of the process control increases, in-situ and real-time etch profile monitoring becomes important. It leads to the development of virtual metrology… read more here.
Keywords: virtual metrology; etch profile; etch; development ... See more keywords