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Published in 2018 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/aacf32
Abstract: An electrical plasma diagnostic method is proposed to determine plasma density and electron temperature. When two square voltages with different amplitudes are applied to a probe tip, a capacitor connected to the probe is charged…
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Keywords:
plasma;
probe;
capacitor;
transient voltage ... See more keywords