A Voting Ensemble Classifier for Wafer Map Defect Patterns Identification in Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2019.2904306
Abstract: A wafer map contains a graphical representation of the locations about defect pattern on the semiconductor wafer, which can provide useful information for quality engineers. Various defect patterns occur due to increasing wafer sizes and… read more here.
Keywords: semiconductor; wafer; wafer map; voting ensemble ... See more keywords