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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13091372
Abstract: The fabrication process of vacuum ultraviolet (VUV) detectors based on traditional semiconductor materials is complex and costly. The new generation of wide-bandgap semiconductor materials greatly reduce the fabrication cost of the entire VUV detector. We…
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Keywords:
nitride nanoribbons;
boron nitride;
chemical vapor;
vapor deposition ... See more keywords