High power vacuum ultraviolet source based on gasdynamic ECR plasma
Sign Up to like & getrecommendations! Published in 2022 at "Journal of Applied Physics"
DOI: 10.1063/5.0074388
Abstract: We report experimental results of vacuum ultraviolet (VUV) emission from the plasma of an electron cyclotron resonance (ECR) discharge in hydrogen, sustained by millimeter-wavelength radiation of a gyrotron. The considered discharge is characterized with the… read more here.
Keywords: vuv emission; formula see; vacuum ultraviolet; radiation ... See more keywords
Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
Sign Up to like & getrecommendations! Published in 2024 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ad7059
Abstract: Controlling fluxes of vacuum ultraviolet (VUV) radiation is important in a number of industrial and biomedical applications of low pressure plasma sources because, depending on the process, VUV radiation may be desired, required to a… read more here.
Keywords: pressure; oxygen vuv; vuv; emission ... See more keywords