Mixed-Type Wafer Defect Pattern Recognition Framework Based on Multifaceted Dynamic Convolution
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2022.3178498
Abstract: Wafer defect pattern recognition (DPR) is an essential process in semiconductor manufacturing. This helps the manufacturers improve their fabrication process, reduce initial costs, and avoid further defects. However, mixed-type defects can be varied and complicated,… read more here.
Keywords: defect; mixed type; wafer defect; framework ... See more keywords
Composite Wafer Defect Recognition Framework Based on Multiview Dynamic Feature Enhancement With Class-Specific Classifier
Sign Up to like & getrecommendations! Published in 2023 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2023.3261924
Abstract: Wafer defect pattern recognition is important for the manufacturing of semiconductor products. By recognizing the type of defect, the engineer can optimize the process of semiconductor manufacturing. Due to the complexity of the manufacturing process,… read more here.
Keywords: wafer defect; class specific; specific classifier; framework ... See more keywords