A method for wafer assignment in semiconductor wafer fabrication considering both quality and productivity perspectives
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Manufacturing Systems"
DOI: 10.1016/j.jmsy.2019.05.006
Abstract: Abstract In the semiconductor wafer fabrication process, wafers go through a series of sequential process steps. Typically, each process step has several machines, and the wafers are assigned to one whenever they enter the process… read more here.
Keywords: productivity perspectives; semiconductor; wafer fabrication; productivity ... See more keywords
Scheduling Semiconductor Wafer Fabrication Using a New Fuzzy Association Classification Rules Based on Dynamic Fuzzy Partition
Sign Up to like & getrecommendations! Published in 2017 at "Chinese Journal of Electronics"
DOI: 10.1049/cje.2016.11.006
Abstract: This paper proposes a dynamic fuzzy partition method of attribute domain suitable for the scheduling problem of Semiconductor wafer fabrication (SWF). Then, based on the above partition method, this paper gives a new Fuzzy association… read more here.
Keywords: fuzzy partition; semiconductor wafer; wafer fabrication; partition ... See more keywords
Semiconductor wafer fabrication production planning using multi-fidelity simulation optimisation
Sign Up to like & getrecommendations! Published in 2020 at "International Journal of Production Research"
DOI: 10.1080/00207543.2019.1683252
Abstract: Semiconductor wafer fabrication is a complicated and time-consuming production process in the semiconductor manufacturing industry. It is very important for the manufacturer to come up with production plans that can most efficiently utilise the manufacturing… read more here.
Keywords: fidelity; production; wafer fabrication; multi fidelity ... See more keywords