Path Planning of Randomly Scattering Waypoints for Wafer Probing Based on Deep Attention Mechanism
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DOI: 10.1109/tsmc.2022.3184155
Abstract: Wafer probing is a critical process employed to measure the yield of wafer fabrication. The primary object of wafer probing is to find the defect grain on the wafer. After a full coverage check, there… read more here.
Keywords: scattering waypoints; randomly scattering; wafer probing; attention ... See more keywords