Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints
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DOI: 10.1109/tsmc.2020.2964032
Abstract: A kind of facilities for wafer fabrication, cluster tools (CTs) need to close down to an idle state from time to time because of periodical maintenance and switches from one type of lots to another,… read more here.
Keywords: residency time; time constraints; cluster tools; time ... See more keywords