Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance
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DOI: 10.1109/tsmc.2017.2721979
Abstract: Wafer revisiting and residency time constraints complicate the scheduling problem of cluster tools in semiconductor manufacturing. Random disturbance to the activity time in operating a tool further complicates such a scheduling problem. To solve this… read more here.
Keywords: time; wafer revisiting; schedule; disturbance ... See more keywords