On-Wafer Wide-Pore Anodic Aluminum Oxide
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DOI: 10.1149/1945-7111/acd87b
Abstract: Anodized aluminum oxide (AAO) has been used as nanotemplates for nanomaterials and nanodevice fabrications. Microfabrication techniques are attracting attention for nanodevice synthesis. However, AAO requires a microfabrication-compatible substrate due to its brittleness. While there are… read more here.
Keywords: aluminum oxide; wide pore; pore; wafer wide ... See more keywords