Articles with "walking actuator" as a keyword



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Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

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Published in 2022 at "Micromachines"

DOI: 10.3390/mi13030412

Abstract: In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached… read more here.

Keywords: piezoelectric walking; long stroke; actuator; wafer probe ... See more keywords