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Published in 2023 at "Metals"
DOI: 10.3390/met13050838
Abstract: With advanced integrated circuit semiconductor chips, the uniformity of microstructure and texture is increasingly required for tantalum (Ta) targets. A combination of warm rolling and 135° cross rolling (CR) at the temperature of 500 °C…
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Keywords:
warm crossing;
texture;
microstructure texture;
effect warm ... See more keywords