Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
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DOI: 10.3390/mi13030454
Abstract: In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and… read more here.
Keywords: dispersion engineering; silicon nitride; dispersion; polymer cladding ... See more keywords