Interferometric thickness measurement of glass plate by phase-shifting analysis using wavelength scanning with elimination of bias phase error
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DOI: 10.1007/s10043-020-00634-4
Abstract: Phase-shifting fringe analysis using wavelength scanning has been broadly applied to the interferometric profiling of the thickness variation of glass plates. However, the nonlinear phase shifting can cause bias error during wavelength scanning. In this… read more here.
Keywords: wavelength scanning; phase shifting; bias; error ... See more keywords