An Investigation of the Wear on Silicon Surface at High Humidity
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DOI: 10.3390/ma11061027
Abstract: Using an atomic force microscope (AFM), the wear of monocrystalline silicon (covered by a native oxide layer) at high humidity was investigated. The experimental results indicated that tribochemistry played an important role in the wear… read more here.
Keywords: wear silicon; surface; high humidity; investigation wear ... See more keywords