Monolithic integration of electro-absorption modulators and photodetectors on III-V CMOS photonics platform by quantum well intermixing.
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DOI: 10.1364/oe.462626
Abstract: Quantum well intermixing (QWI) on a III-V-on-insulator (III-V-OI) substrate is presented for active-passive integration. Shallow implantation at a high temperature, which is essential for QWI on a III-V-OI substrate, is accomplished by phosphorus molecule ion… read more here.
Keywords: photonics; monolithic integration; integration; integration electro ... See more keywords