High‐Q Thin‐Film Lithium Niobate Microrings Fabricated with Wet Etching
Sign Up to like & getrecommendations! Published in 2022 at "Advanced Materials"
DOI: 10.1002/adma.202208113
Abstract: Thin‐film lithium niobate (TFLN) has been widely used in electro‐optic modulators, acoustic‐–optic modulators, electro‐optic frequency combs, and nonlinear wavelength converters owing to the excellent optical properties of lithium niobate. The performance of these devices is… read more here.
Keywords: wet etching; lithium niobate; film lithium; thin film ... See more keywords
Efficient Terahertz Plasmonic Absorbers with V-Grooves Using Highly Doped Silicon Substrate and Simple Wet-Etching Techniques
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Infrared, Millimeter, and Terahertz Waves"
DOI: 10.1007/s10762-017-0443-5
Abstract: We experimentally demonstrate that at terahertz frequencies perfect plasmonic absorbers made from a 3D V-groove array in a highly doped silicon wafer can be easily realized using simple wet-etching process. The surface plasmon modes can… read more here.
Keywords: highly doped; doped silicon; plasmonic absorbers; simple wet ... See more keywords
Cavity etching evolution on the A-plane of sapphire crystal in molten KOH etchant
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Crystal Growth"
DOI: 10.1016/j.jcrysgro.2020.125926
Abstract: Abstract Chemical wet etching technology is widely applied in semiconductor device fabrication such as the patterned sapphire substrates. However, the etching of pre-formed structure is still lack of investigations, which has potential applications in the… read more here.
Keywords: sapphire crystal; molten koh; sapphire; cavity ... See more keywords
Etching Behaviors of Sapphire's C- Plane Cavity
Sign Up to like & getrecommendations! Published in 2021 at "Surface Science"
DOI: 10.1016/j.susc.2021.121805
Abstract: Abstract Techniques to fabricate patterned sapphire substrates (PSSs) have attracted much attention in recent decades. Wet etching behaviors and crystalline sapphire processes are critical for PSSs applications to improve the performance of light-emitting diodes. This… read more here.
Keywords: plane; etching behaviors; sapphire; wet etching ... See more keywords
Toward Controllable Wet Etching of Monocrystalline Silicon: Roles of Mechanically Driven Defects.
Sign Up to like & getrecommendations! Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c04299
Abstract: Wet chemical etching is essential not only for processing silicon (Si) wafers but also for forming diverse structures, significantly promoting the development of the semiconductor industry. However, tight control of etched topography at the nanoscale… read more here.
Keywords: controllable wet; etching monocrystalline; roles mechanically; wet etching ... See more keywords
Fabrication of nanopores and nanoslits with feature sizes down to 5 nm by wet etching method.
Sign Up to like & getrecommendations! Published in 2018 at "Nanotechnology"
DOI: 10.1088/1361-6528/aaa523
Abstract: This paper presents an improved three-step wet etching method for the fabrication of single-crystal silicon nanopores and nanoslists. A diffusion model was built to analyze the influence of the color-based feedback mechanism on the final… read more here.
Keywords: nanopores nanoslits; fabrication; etching method; wet etching ... See more keywords
Transient and Stable Profiles During Anisotropic Wet Etching of Quartz
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2017.2707096
Abstract: This paper presents a comprehensive analysis of the transient (short-term) and stable (long-term) cross-sectional profiles of elongated trenches formed by anisotropic wet etching on Z-cut quartz. Because all quartz planes parallel (and near-parallel) to the… read more here.
Keywords: etch rate; term; anisotropic wet; quartz ... See more keywords
Oxidation and wet etching behavior of sputtered Mo-Ti-Al films
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/1.5009289
Abstract: Exposure of Mo thin films above 300 °C in ambient atmosphere results in surface oxidation, leading to the formation of colored oxide films deteriorating their performance in thin film transistor liquid crystal displays. In this study,… read more here.
Keywords: wet etching; behavior sputtered; oxidation wet; etching behavior ... See more keywords
Realization of Circular Slot Frequency Selective Surfaces using Photoplotter and Wet Etching Technique for Terahertz Material Sensing Applications
Sign Up to like & getrecommendations! Published in 2020 at "International Journal of Integrated Engineering"
DOI: 10.30880/ijie.2020.12.06.006
Abstract: Terahertz radiation is in spectral region of 0.1THz to 10THz between microwave and infrared part of the electromagnetic spectrum. Terahertz radiation can propagate through wide range of dielectric materials [1]. This sparked many researchers’ interest… read more here.
Keywords: detection; frequency; material; spectroscopy ... See more keywords
A Study on the Sub-5 nm Nano-Step Height Reference Materials Fabricated by Atomic Layer Deposition Combined with Wet Etching
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13091454
Abstract: Nano-steps, as classical nano-geometric reference materials, are very important for calibrating measurements in the semiconductor industry; therefore, controlling the height of nano-steps is critical for ensuring accurate measurements. Accordingly, in this study nano-steps with heights… read more here.
Keywords: nano steps; reference; nano step; reference materials ... See more keywords
InGaN Laser Diodes with Etched Facets for Photonic Integrated Circuit Applications
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14020408
Abstract: The main objective of this work is to demonstrate and validate the feasibility of fabricating (Al, In) GaN laser diodes with etched facets. The facets are fabricated using a two-step dry and wet etching process:… read more here.
Keywords: photonic integrated; step; diodes etched; laser diodes ... See more keywords