Evaluating effectiveness of dust by-product treatment with scrubbers to mitigate explosion risk in ZrO2 atomic layer deposition process.
Sign Up to like & getrecommendations! Published in 2020 at "Journal of hazardous materials"
DOI: 10.1016/j.jhazmat.2020.123284
Abstract: In processes of manufacturing semiconductors, reactive by-products (as a form of fine powder, i.e., dust) are deposited in pipes installed on post processing and exhaust systems, potentially involving a considerable explosion risk. In this study,… read more here.
Keywords: treatment; product; wet scrubber; explosion ... See more keywords
Experimental evaluation of re-entrainment from wet scrubber filtered containment venting systems
Sign Up to like & getrecommendations! Published in 2020 at "Nuclear Engineering and Design"
DOI: 10.1016/j.nucengdes.2020.110837
Abstract: Abstract Wet scrubber-based filtered containment venting systems (FCVSs) are commonly deployed at nuclear power plants, owing to the high degree of aerosol, iodine, and organic iodine retention that is possible through the pool scrubbing action… read more here.
Keywords: pool; filtered containment; containment venting; entrainment ... See more keywords
Removal of Gaseous Volatile Organic Compounds by a Multiwalled Carbon Nanotubes/Peroxymonosulfate Wet Scrubber.
Sign Up to like & getrecommendations! Published in 2022 at "Environmental science & technology"
DOI: 10.1021/acs.est.2c03590
Abstract: In this study, a wet scrubber coupled with a persulfate-based advanced oxidation process [carbocatalysts/peroxymonosulfate (PMS)] was demonstrated to efficiently remove gaseous volatile organic compounds (VOCs). The removal efficiency of a representative VOC, styrene, was stable… read more here.
Keywords: gaseous volatile; spectroscopy; removal; wet scrubber ... See more keywords
Rigorous Tritium Wet Scrubber Column Modeling and Design
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DOI: 10.1080/15361055.2019.1705747
Abstract: Abstract The rigorous steady-state equilibrium stage Tritium Wet Scrubber Column model has been developed. The model includes the six water isotopologues H2O, HDO, HTO, D2O, DTO, and T2O; heat balance; and packing pressure drop. Heat… read more here.
Keywords: tritium wet; column; water; scrubber column ... See more keywords
Development of an Integrated Electrostatic Precipitator and Wet Scrubber System for Controlling Nox and Particulate Matter Emissions From a Semiconductor Manufacturing Process
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Industry Applications"
DOI: 10.1109/tia.2020.3023670
Abstract: An integrated electrostatic precipitator (ESP) and wet scrubber system were developed to control nitrogen oxides (NOx) and particulate matter (PM) emissions from a semiconductor manufacturing process. The integrated system consisted of a NO oxidizer, wet… read more here.
Keywords: removal efficiency; wet scrubber; scrubber system; scrubber ... See more keywords