Machine Learning-Based Wheel Monitoring for Sapphire Wafers
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DOI: 10.1109/access.2021.3067329
Abstract: The thinning of sapphire wafers is a key process that affects the quality of optoelectronic devices. In the grinding process for sapphire, a hard and brittle material, the grade and surface conditions (wearing and chip… read more here.
Keywords: wheel monitoring; sapphire wafers; wheel; grinding process ... See more keywords