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Published in 2019 at "Electronics Letters"
DOI: 10.1049/el.2018.7680
Abstract: This Letter proposes a novel 3-hot-wire acoustic particle velocity sensor with high sensitivity and low self-noise for the first time. Three parallel wires, covered with platinum film, are suspended on silicon substrate by MEMS process.…
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Keywords:
particle velocity;
hot wire;
acoustic particle;
velocity sensor ... See more keywords