A Fast and Accurate Workflow for Analytic 3D FIB-SEM Tomography
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DOI: 10.1017/s1431927619005324
Abstract: The integration of energy dispersive spectrometry (EDS) and electron backscattered diffraction (EBSD) on a scanning electron microscope (SEM) are routine methods of material analysis. EDS offers chemical quantification and element spatial distribution in the form… read more here.
Keywords: fib sem; fast accurate; workflow analytic; analytic fib ... See more keywords