Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films.
Sign Up to like & getrecommendations! Published in 2018 at "IEEE transactions on ultrasonics, ferroelectrics, and frequency control"
DOI: 10.1109/tuffc.2018.2814349
Abstract: Direct-write laser grayscale lithography has been used to facilitate a single-step patterning technique for multilayer lead zirconate titanate (PZT) thin films. A 2.55- -thick photoresist was patterned with a direct-write laser. The intensity of the… read more here.
Keywords: thin films; laser; direct write; layer ... See more keywords