Mechanical properties of single-phase Al1−In N films across the compositional range (0 ≤ x ≤ 0.7) grown by radio-frequency magnetron sputtering
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DOI: 10.1016/j.apsusc.2019.144335
Abstract: Abstract Aluminum indium nitride (Al1−xInxN) films across the compositional range (0 ≤ x ≤ 0.7) were grown on silicon substrate by radio-frequency magnetron sputtering. The In composition was tuned by varying the number of In blocks (nIn) covered on… read more here.
Keywords: phase; al1; mechanical properties; xinxn films ... See more keywords