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Published in 2023 at "Materials"
DOI: 10.3390/ma16051781
Abstract: Aluminum scandium nitride (Al1−xScxN) film has drawn considerable attention owing to its enhanced piezoelectric response for micro-electromechanical system (MEMS) applications. Understanding the fundamentals of piezoelectricity would require a precise characterization of the piezoelectric coefficient, which…
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Keywords:
al1 xscxn;
xscxn;
synchrotron xrd;
situ synchrotron ... See more keywords