Al1−xScxN Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
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DOI: 10.3390/mi13081282
Abstract: Ferroelectric thin films of wurtzite-type aluminum scandium nitride (Al1−xScxN) are promising candidates for non-volatile memory applications and high-temperature sensors due to their outstanding functional and thermal stability exceeding most other ferroelectric thin film materials. In… read more here.
Keywords: xscxn thin; al1 xscxn; thermal expansion; thin films ... See more keywords