Thickness-dependent crystal structure and electric properties of epitaxial ferroelectric Y2O3-HfO2 films
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DOI: 10.1063/1.5040018
Abstract: The thickness dependences of the crystal structure and electric properties of (111)-oriented epitaxial 0.07YO1.5-0.93HfO2 (YHO7) ferroelectric films were investigated for the film thickness range of 10–115 nm. The YHO7 films were grown by pulsed laser deposition… read more here.
Keywords: crystal structure; yho7 films; structure electric; yho7 ... See more keywords