Diamond Etching Beyond 10 μm with Near-Zero Micromasking
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DOI: 10.1038/s41598-019-51970-8
Abstract: To exploit the exceptional properties of diamond, new high quality fabrication techniques are needed to produce high performing devices. Etching and patterning diamond to depths beyond one micron has proven challenging due to the hardness… read more here.
Keywords: etching beyond; zero micromasking; beyond near; diamond etching ... See more keywords