Zirconia-strengthened yttria ceramics for plasma chamber applications
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DOI: 10.1016/j.ceramint.2020.11.085
Abstract: Abstract Yttria (Y2O3) is the most popular lining material for the inner walls of plasma chambers, owing to its well-known resistance against corrosion by reactive fluorinated plasma. Yttria has a relatively lower toughness and strength… read more here.
Keywords: ceramics plasma; yttria ceramics; zirconia strengthened; strengthened yttria ... See more keywords