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Published in 2018 at "Semiconductors"
DOI: 10.1134/s1063782618030028
Abstract: Copper (I) oxide and zinc oxide films are formed on silicon and glassy quartz substrates by magnetron assisted sputtering. The thickness of the films is tens and hundreds of nanometers. The films are grown at…
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Keywords:
formation cu2o;
crystal layers;
cu2o zno;
assisted sputtering ... See more keywords