Realization of Single Layer Microbolometer Detector Pixel Using ZnO Material
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2020.2992991
Abstract: This paper presents the realization of a single layer microbolometer pixel fabricated using only ZnO material coated with atomic layer deposition. Due to the stress-free nature and high temperature coefficient of resistance of the ALD… read more here.
Keywords: single layer; microbolometer; layer; zno material ... See more keywords