Structure, Composition, and Properties of Zn- and O-Ion Implanted Silicon at Elevated Temperatures
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DOI: 10.1134/s1063782620120313
Abstract: Czochralski-grown Si substrates (n-type, orientation (100)) are subjected to double implantation, notably, initially by 64Zn+ ions with a dose of 5 × 1016 cm–2 and an energy of 50 keV and then with 16O+ ions… read more here.
Keywords: phase; structure composition; zno phase; composition properties ... See more keywords