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Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.1c24880
Abstract: Zinc oxynitride (ZnON) has the potential to overcome the performance and stability limitations of current amorphous oxide semiconductors because ZnON-based thin-film transistors (TFTs) have a high field-effect mobility of 50 cm2/Vs and exceptional stability under…
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Keywords:
bilayer structure;
znon;
air;
stability ... See more keywords
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1
Published in 2017 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.7b03385
Abstract: In this work, the effects of fluorine incorporation in high mobility zinc oxynitride (ZnON) semiconductor are studied by both theoretical calculations and experimental evaluation of thin film transistors (TFTs). From density functional theory (DFT) calculations,…
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Keywords:
thin film;
fluorine doping;
znon;
effects fluorine ... See more keywords
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Published in 2024 at "Materials Research Express"
DOI: 10.1088/2053-1591/ad1e0f
Abstract: Zinc oxynitride (ZnON) has recently emerged as a highly promising band gap-tunable semiconductor material for optoelectronic applications. In this study, a novel DC reactive sputtering protocol was developed to fabricate ZnON films with varying elemental…
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Keywords:
znon;
structure;
reactive sputtering;
gap ... See more keywords