Influence of Barrier Layers on ZrCoCe Getter Film Performance
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DOI: 10.3390/ma16072916
Abstract: Improving the vacuum degree inside the vacuum device is vital to the performance and lifespan of the vacuum device. The influence of the Ti and ZrCoCe barrier layers on the performance of ZrCoCe getter films,… read more here.
Keywords: zrcoce getter; barrier layers; performance; getter film ... See more keywords