Reprint of “Blister formation in ZrN/SiN multilayers after He irradiation”
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DOI: 10.1016/j.surfcoat.2019.06.041
Abstract: Abstract The work is dedicated to the investigation of blister formation in ZrN/SiNx multilayer films irradiated with He ions (30 keV) and annealed in a vacuum at 600 °C. Multilayer films were prepared by reactive magnetron sputter-deposition… read more here.
Keywords: zrn; microscopy; zrn sinx; blister formation ... See more keywords