Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering.
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DOI: 10.1155/2023/3604077
Abstract: ZrNx films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (r = N2/[Ar + N2]). The structure and composition of the thin films were characterized as a… read more here.
Keywords: zrnx films; structure; zrnx; nitrogen partial ... See more keywords