Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering.
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DOI: 10.1155/2023/3604077
Abstract: ZrNx films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (r = N2/[Ar + N2]). The structure and composition of the thin films were characterized as a… read more here.
Keywords: zrnx films; structure; zrnx; nitrogen partial ... See more keywords
Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films
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DOI: 10.3390/coatings10050476
Abstract: ZrNx (x = 0.67–1.38) films were fabricated through direct current magnetron sputtering by a varying nitrogen flow ratio [N2/(Ar + N2)] ranging from 0.4 to 1.0. The structural variation, bonding characteristics, and mechanical properties of… read more here.
Keywords: bonding characteristics; zrnx films; nitrogen flow; flow ratio ... See more keywords