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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13030419
Abstract: The quadrature coupling error is an important factor that affects the detection output of microelectromechanical system (MEMS) gyroscopes. In this study, two quadrature error control methods, quadrature force-to-rebalance control (Mode I) and quadrature stiffness control…
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Keywords:
quadrature;
control mode;
zro drift;
mode ... See more keywords