The effects of rapid thermal annealing and microwave annealing on the electrical properties of ZrO2 metal-insulator-metal capacitors
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DOI: 10.1016/j.ijleo.2018.11.048
Abstract: Abstract The effects of different rapid thermal annealing (RTA) and microwave annealing (MWA) on the electrical behaviors of ZrO2 metal-insulator-metal (MIM) capacitors were studied in detail. The maximum capacitance density was achieved at 1400 W for… read more here.
Keywords: thermal annealing; metal insulator; insulator metal; microwave annealing ... See more keywords