Enhancing ferroelectric stability: wide-range of adaptive control in epitaxial HfO2/ZrO2 superlattices
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DOI: 10.1038/s41467-025-61758-2
Abstract: The metastability of the polar phase in HfO2, despite its excellent compatibility with the complementary metal-oxide-semiconductor process, remains a key obstacle for its industrial applications. Traditional stabilization approaches, such as doping, often induce crystal defects… read more here.
Keywords: epitaxial hfo2; zro2 superlattices; hfo2 zro2; hfo2 ... See more keywords