Role of Fluoride Doping in Low-Temperature Combustion-Synthesized ZrOx Dielectric Films.
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DOI: 10.1021/acsami.1c22853
Abstract: Zirconium oxide (ZrOx) is an attractive metal oxide dielectric material for low-voltage, optically transparent, and mechanically flexible electronic applications due to the high dielectric constant (κ ∼ 14-30), negligible visible light absorption, and, as a… read more here.
Keywords: fluoride doping; zrox; low temperature; spectroscopy ... See more keywords