Structural characterization of Zr-doped ZnO films deposited on quartz substrates by reactive radio frequency magnetron co-sputtering
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DOI: 10.1016/j.tsf.2018.02.011
Abstract: Abstract Zr-doped ZnO (Zn1−xZrxO, 0 ≤ x ≤ 0.067; ZZO) thin films were grown at room temperature by reactive radio frequency co-sputtering on quartz substrates The ZZO films have a strong preferred orientation toward the c-axis but this orientation… read more here.
Keywords: reactive radio; zzo films; radio frequency; quartz substrates ... See more keywords