LAUSR

ABSTRACT This paper reviews the features of the structure, composition and mechanical properties of the subsurface layer of pure lithium niobate. Depth of this layer ranges up to 20 μm, and it's structure and composition vary significantly from the bulk of a material. It is shown that mechanical properties of said layer differ from the bulk material as well, mainly due to a polishing, which increases density of defects, namely dislocations. High density of dislocation leads to drift of various parameters in the optical modulators, making results of their work inconsistent. These results are important in the production of various devices that are created on the basis of lithium niobate.